产品图片：

产品型号：

CS-200

产品介绍：

Dense carbon film for high temp. anneal

Max. Substrate φ200㎜（Transfer tray available）

产品特点：

• 
  

• 1. Key point for carbon process
  - Front(Ion Implantation) and Back(Annealing) processes are well known.

•  

• 2. Good process experience for CC deposition
  - AIST and SIC production company uses ULVAC system.

•  

•  3. Optional items
  - High temp stage, RF stage bias, 3MFC line, DRP, etc.