PVD Products’ provides a wide variety of custom physical vapor deposition systems.

Shown here is a dual chamber system including PLD and Magnetron sputtering connected via a dual wafer loadlock. PVD can provide combination systems like this or completely integrated custom systems specific to the customer requirements.

三腔室设计： PLD腔体+Sputter磁控溅射腔体+Load-lock样品传输腔体

3 UHV Mags

3 x 15 cc ebeam

RHEED

Ellipsometer

100-mm wafers

850°C

RF Bias

<5 x 10-9Torr