Optical specifications光学规格

Standard标准规格

Scan width扫描宽度

300 mm

170 mm

Wavelength波长(nm)

355-375

515-532

1030-1070

Minimum Spot*小光斑尺寸(FWHM)1

9 μm

13 μm

26 μm

Minimum Spot*小光斑尺寸(1/e2 dia)

15 μm

22 μm

44 μm

Input beam diameter(1/e2 dia)

输入光斑直径(1/e2 dia)

11 mm

6 mm

Input clear aperture输入数值孔径

19 mm

10 mm

Position Accuracy定位精度

± 10 μm or ±1 μm 2

Line straightness线平直度

15 μm or 1 μm 2

Spot repeatability光斑重复性

< 3 μm 3

System specifications系统规格

Input beam输入光斑

Parallel beam

Scan speed扫描速度

56 – 224 lines per second

100 – 400 lines per second

Moving spot speed光斑移动速度

25 – 100 meters per second

Scanner mechanical efficiency

扫描头机械效率效率

71 %

Optical efficiency光学效率

> 85 % GR/IR

Average Laser power 1平均激光功率

140 W (>7 ps) 50W (200 fs)

Minimum pulse width*小脉冲宽度

> 200 fs

Maximum pulse energy*小脉冲能量

150 μJ (ps) 50 μJ (fs)

Mechanical interface机械接口

Industry standard interface

Scanner to substrate clearance

扫描头到基板距离

26.5 mm

18 mm

Power consumption功率

125 W max.

Electrical supply电源

Mono + earth 50/60 Hz， 100-240 VAC

PC Connection电脑链接

Ethernet TCP/IP protocol and USB3

Cable Length连线长度

Max. 5 meter between scanner unit and control electronics