技术参数：

Candela CS1 SPECIFICATIONS

Substrate

Sizes: 2 in. – 200 mm diameter*

*Other sizes may be available on request

Thickness: 350 μm – 1，100 μm

Material: Any opaque， polished surface which scatters

≥ 10% of incident light

Any clear， polished substrate which scatters ≥ 10% of incident light

Defect Sensitivity

0.3 μm diameter PSL sphere equivalent ≥ 95% capture rate

(PSL on bare Si)

Other Defects and Applications

Defect Types: Particles， scratches， stains， pits， and bumps.

Classification accuracy and minimum

detectable sizes depend on optical

signatures of defects.

Sensitivity: Minimum detectable size for automatic

defect classification:

- Scratches: 100 μm long， 0.1 μm wide，

50 Å deep

- Pits: 20 μm diameter， 50 Å deep

- Stains: 20 μm diameter， 10 Å thick

Note: Defect signal must be more than 3x background P-V signal