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应用领域：
适用于电子半导体、大规模集成电路、MAMS、单晶硅多晶硅及硅外延、LED、TFT、氮化镓、碳化硅、科研开发、实验分析等。
特点：
● 双塔交替吸附再生，全自动连续运行
● EP级316L抛光不锈钢管件
● 配置0.003μm过滤器，去除率可达99.9999999%
● 西门子 PLC 可接入DCS系统
● 安全报警功能完善
● 可提供远程云服务
● 超净环境中生产组装
● 气体处理量10-20000Nm3/h
9N超纯气体纯化器 | ||||||||||||||||
系列型号 | 适用气体 | 原料气指标 | 产品气指标 | |||||||||||||
N2 | H2 | O2 | Ar | He | O2 | H2O | CO2 | CO | CH4 | H2 | N2 | 颗粒度 | ||||
9VV | ● | ● | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | — | 0.003μm | ||
9OVV | ● | — | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | 0.003μm | ||
9VVX | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003μm | ||
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003μm | ||||
9X | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003μm | ||
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003μm | ||||
注：常用流量规格：1-20000Nm3/h;常用压力：1-20Mpa | ||||||||||||||||
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