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STACISIII是先进的主动振动隔离系统。采用先进的惯性振动传感器,复杂的控制算法,和先进的压电致动器。STACIS通过连续测量地板活动、扩大和收缩压电致动器过滤地板振动来进行实时隔离振动。
*初被设计用于先进半导体工厂的精密显微光刻、计量和检测设备的隔振,STACIS现在是嘈杂环境中敏感仪器的行业标准解决方案,包括但不局限于半导体晶圆厂、失效分析实验室、纳米技术研究、纳米加工设备和材料研究。
STACIS III包括一个新型改进的数字控制器----DC - 2020。它的前后面板上有新型双核处理器,以太网和USB串口,这个新型先进控制系统为用户提供了一个现代的、易于使用的图形用户界面(GUI)。
拥有在世界各地的数百个成功安装案例,STACIS对于大部分振动敏感仪器来说都是理想的振动消除系统。
Specifications-
Performance Specifications
Active degrees of freedom | 6 |
Active bandwidth | 0.6 Hz - 150 Hz |
Passive natural frequency | 18 Hz vertical and horizontal |
Effective active resonant frequency | 0.5 Hz |
Isolation at 1 Hz | 40% - 70% |
Isolation at ≥2 Hz | ≥90% |
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction) | 0.3 sec |
Internal noise | <0.1 nm RMS |
Operating load range per isolator | Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg) |
Static lift capacity per isolator | 9000 lbs (4090 kg) |
Stiffness (1000 lb / 454 kg mass, Med capacity isolator) | 40,000 lb/in. (73 x 105 N/m) |
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator | <0.02 μG broadband RMS |
Isolator Design, Dimensions, and Environmental and Utility Requirements
Environmental and safety | CE and RoHS compliant |
Active isolation elements | high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
Passive isolation element | single stiff isotropic elastomer (no compressed air supply required) |
Vibration sensor elements | downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
Active feedback control loop | Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface |
Isolator dimensions (WxDxH) | 11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm |
Isolator weight | 75 lb (34 kg) |
Operating temperature | 50° - 90° F 10° - 32° C |
Storage temperature | -40° - 130° F -40° - 55° C |
Humidity (operating) | 30 - 60% |
System power requirements | 100, 120, 230, 240 VAC 50/60 Hz AC; <600 w CE compliant |
Floor displacement | <480 μin. (12 μm) below 10 Hz |
Isolator count per system | minimum of 3 |
Options | laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods |
DC-2020 Controller Specifications
Dimensions (WxDxH) | 19 x 8.5 x 1.75 in. 483 x 216 x 45 mm |
Weight | 6.3 lb (2.9 kg) |
Processor | 150/75 MHz dual core |
Sampling rate | 10 kHz |
Analog outputs | 16 channels |
Analog inputs | 16 channels |
Status light | single LED |
Front panel ports | 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
Rear panel ports | 1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators |
User interface | Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
Performance-
4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)
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